Low Flow Mass Flow Meter / Controller
What is a low flow mass flow meter?
A low flow mass flow meter (MFM) measures the mass flow rate of a fluid (gas or liquid) passing through a system, typically in ranges from milliliters per minute (mL/min) to a few liters per minute (L/min). Unlike volumetric flow meters, mass flow meters account for fluid density, providing direct mass flow readings essential for processes requiring precise stoichiometry or compliance with environmental regulations.
What is a low flow mass flow controller?
A low flow mass flow controller (MFC) combines a mass flow meter with a control valve and feedback system to regulate flow rates in real time. It adjusts the valve position to maintain a user-defined setpoint, ensuring consistent delivery even under fluctuating pressures or temperatures.
| Typen | Coriolis MFM / MFC | Thermal MFM / MFC | DP Gas MFM / MFC |
|---|---|---|---|
| Working Principles | Uses vibrating tubes to measure mass flow via the Coriolis effect. | Measures heat dissipation from a heated element. | Adopts the principle of differential pressure mass measurement. |
| Measuring Medium | Gases / Liquids | Gase | Gase |
| Messbereich | 0 ~ (40g/h~1000kg/h) | 2SCCM～6000SLM | 2SCCM～3000SLM |
| Genauigkeit | Gas: ±0.5% F.S; Liquid: ±0.25% F.S | ± 0.5% F.S; ± 1% F.S | ± 0.5% F.S; ± 1% F.S |
| Max. Prozessdruck | 100 bar | 100 bar | 30 bar |
| Working temperature range | 0～70℃ | 0～50℃ | 10～50℃ |
| Ausgänge | 0～5V, 4-20mA, 1～5V | 0～5V, 4-20mA, 1～5V | 0～5V, 4-20mA, 1～5V |
| Digital communication | RS232/485，MODBUS protocol | RS232/485，MODBUS protocol，PROFIBUS protocol | RS232/485，MODBUS protocol |
| Prozess-Verbindungen | φ6，φ8，φ10，φ12， sleeve, flanged, etc | φ8, φ10, φ12, flanged | φ8, φ10, φ12, flanged |