Low Flow Mass Flow Meter / Controller

What is a low flow mass flow meter?

low flow mass flow meter (MFM) measures the mass flow rate of a fluid (gas or liquid) passing through a system, typically in ranges from milliliters per minute (mL/min) to a few liters per minute (L/min). Unlike volumetric flow meters, mass flow meters account for fluid density, providing direct mass flow readings essential for processes requiring precise stoichiometry or compliance with environmental regulations.

What is a low flow mass flow controller?

low flow mass flow controller (MFC) combines a mass flow meter with a control valve and feedback system to regulate flow rates in real time. It adjusts the valve position to maintain a user-defined setpoint, ensuring consistent delivery even under fluctuating pressures or temperatures.

Coriolis Mass Flow Meter / Controller MTL20FE

SKUMTL20FE
  • Fluid Type: Gas, Liquids
  • Turn Down Ratio: 50:1 for mass flow controller; 100:1 for mass flow meter.
  • It can measure high viscosity fluid and high density gas.
Dokładność

Gas: ±0.5% F.S; Liquid: ±0.25% F.S

Zakres pomiarowy

0 ~ (40g/h~1000kg/h)

Working Temperature Range

0~70℃

Maks. Ciśnienie procesowe

100 bar

Differential Pressure Mass Flow Meter / Controller MTL20FC

SKUMTL20FC
  • Fluid Type: Gas, Liquid, Steam
  • Simultaneously displaying instantaneous and cumulative flow rate, pressure, and temperature
Dokładność

± 0.5% F.S; ± 1% F.S

Zakres pomiarowy

2SCCM~3000SLM

Working Temperature Range

10~50℃

Maks. Ciśnienie procesowe

30 bar

Thermal Gas Mass Flow Meter / Controller (MTL20FD)

SKUMTL20FD
  • Fluid Type: Gas
  • Thermal principle, laboratory level measurement accuracy.
  • High stability, tubular shunt to avoid blockage.
Dokładność

± 0.5% F.S; ± 1% F.S

Zakres pomiarowy

02SCCM~6000SLM

Working Temperature Range

0~50℃

Maks. Ciśnienie procesowe

100 bar

Comparison of the Three Mass Flow Meters / Controllers above

RodzajeCoriolis MFM / MFCThermal MFM / MFCDP Gas MFM / MFC
Working PrinciplesUses vibrating tubes to measure mass flow via the Coriolis effect.Measures heat dissipation from a heated element.Adopts the principle of differential pressure mass measurement.
Measuring MediumGases / LiquidsGazyGases/Liquids/Steam
Zakres pomiarowy0 ~ (40g/h~1000kg/h)2SCCM~6000SLM2SCCM~3000SLM
DokładnośćGas: ±0.5% F.S; Liquid: ±0.25% F.S± 0.5% F.S; ± 1% F.S± 0.5% F.S; ± 1% F.S
Maks. Ciśnienie procesowe100 bar100 bar30 bar
Working temperature range0~70℃0~50℃10~50℃
Wyjścia0~5V, 4-20mA, 1~5V0~5V, 4-20mA, 1~5V0~5V, 4-20mA, 1~5V
Digital communicationRS232/485,MODBUS protocolRS232/485,MODBUS protocol,PROFIBUS protocolRS232/485,MODBUS protocol
Połączenia procesoweφ6,φ8,φ10,φ12, sleeve, flanged, etcφ8, φ10, φ12, flangedφ8, φ10, φ12, flanged
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