Low Flow Mass Flow Meter / Controller
What is a low flow mass flow meter?
A low flow mass flow meter (MFM) measures the mass flow rate of a fluid (gas or liquid) passing through a system, typically in ranges from milliliters per minute (mL/min) to a few liters per minute (L/min). Unlike volumetric flow meters, mass flow meters account for fluid density, providing direct mass flow readings essential for processes requiring precise stoichiometry or compliance with environmental regulations.
What is a low flow mass flow controller?
A low flow mass flow controller (MFC) combines a mass flow meter with a control valve and feedback system to regulate flow rates in real time. It adjusts the valve position to maintain a user-defined setpoint, ensuring consistent delivery even under fluctuating pressures or temperatures.
- Ultra-Low Flow Detection with High Accuracy: Designed for precise control of micro to low flow rates, our mass flow meters and controllers deliver accurate measurement from as low as 0.1 sccm.
- Multi-Fluid, Multi-Range, and Multi-Principle Flexibility: We offer various sensor principles, including Coriolis, Thermal Mass, and Differential Pressure, to meet different precision, flow rate, and application requirements.
- Fast Response and Stable Control: With a control response time under 1 second, our controllers ensure real-time flow regulation.
- Compact Design for Easy Integration: Our low flow mass flow meters/controllers come in a compact, modular form factor, making them easy to integrate into analytical instruments, automated systems, and compact gas panels.
Coriolis Mass Flow Meter / Controller MTL20FE
- Fluid Type: Gas, Liquids
- Turn Down Ratio: 50:1 for mass flow controller; 100:1 for mass flow meter.
- It can measure high viscosity fluid and high density gas.
Accuracy
Gas: ±0.5% F.S; Liquid: ±0.25% F.S
Measuring Range
0 ~ (40g/h~1000kg/h)
Working Temperature Range
0～70℃
Max. Process Pressure
100 bar
Differential Pressure Mass Flow Meter / Controller MTL20FC
- Fluid Type: Gas, Liquid, Steam
- Simultaneously displaying instantaneous and cumulative flow rate, pressure, and temperature
Accuracy
± 0.5% F.S; ± 1% F.S
Measuring Range
2SCCM～3000SLM
Working Temperature Range
10～50℃
Max. Process Pressure
30 bar
Thermal Gas Mass Flow Meter / Controller (MTL20FD)
- Fluid Type: Gas
- Thermal principle, laboratory level measurement accuracy.
- High stability, tubular shunt to avoid blockage.
Accuracy
± 0.5% F.S; ± 1% F.S
Measuring Range
02SCCM～6000SLM
Working Temperature Range
0～50℃
Max. Process Pressure
100 bar
Comparison of the Three Mass Flow Meters / Controllers above
| Types | Coriolis MFM / MFC | Thermal MFM / MFC | DP Gas MFM / MFC |
|---|---|---|---|
| Working Principles | Uses vibrating tubes to measure mass flow via the Coriolis effect. | Measures heat dissipation from a heated element. | Adopts the principle of differential pressure mass measurement. |
| Measuring Medium | Gases / Liquids | Gases | Gases/Liquids/Steam |
| Measuring Range | 0 ~ (40g/h~1000kg/h) | 2SCCM～6000SLM | 2SCCM～3000SLM |
| Accuracy | Gas: ±0.5% F.S; Liquid: ±0.25% F.S | ± 0.5% F.S; ± 1% F.S | ± 0.5% F.S; ± 1% F.S |
| Max. Process Pressure | 100 bar | 100 bar | 30 bar |
| Working temperature range | 0～70℃ | 0～50℃ | 10～50℃ |
| Outputs | 0～5V, 4-20mA, 1～5V | 0～5V, 4-20mA, 1～5V | 0～5V, 4-20mA, 1～5V |
| Digital communication | RS232/485，MODBUS protocol | RS232/485，MODBUS protocol，PROFIBUS protocol | RS232/485，MODBUS protocol |
| Process Connections | φ6，φ8，φ10，φ12， sleeve, flanged, etc | φ8, φ10, φ12, flanged | φ8, φ10, φ12, flanged |